000 00247nam a2200097Ia 4500
008 160930s9999 xx 000 0 und d
100 _aChang, C. Y. and Sze, S. M.
245 _aULSI Technology
260 _aNew York
_bMc Graw - Hill Pub.
942 _cBK
999 _c2121
_d2121