000 00304nam a2200097Ia 4500
008 160930s9999 xx 000 0 und d
100 _aMax, Gary S. and Spanos, Costas J.
245 _aFundamentals of Semiconductar - Manufacturing and Process Control
260 _aNew Jersey
_bJohn Wiley & Sons
942 _cBK
999 _c3356
_d3356