000 00287nam a2200109Ia 4500
008 160930s9999 xx 000 0 und d
100 _aRai, Choudhary (ed.)
245 _aMEMS & MOEMS Technology and Application
260 _aNew Delhi
_bPHI Learning
_c2000
300 _axi,520
942 _cBK
999 _c5483
_d5483