000 00290nam a2200109Ia 4500
008 160930s9999 xx 000 0 und d
100 _aHsu, Tai-Ran
245 _aMEMS and Microsystem : design and manufacture
260 _aNew Delhi
_bTata McGraw Hill
_c2008
300 _axii,404
942 _cBK
999 _c5489
_d5489